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By J.H.U. Brown, James Francis Dickson

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If we view the step washout response/(r) in terms of a distribu- 37 PARAMETER ESTIMATION IN BIOLOGICAL SYSTEMS OSCILLOSCOPE TIDAL VOLUME DAC DIGITAL CONTROLLER PDP - 8 / E SCHMITT ά 'W, FLEISCH PNEUMOTACH PRESSUF H HTRANSDUCE VALVE -h gjfr / ^ n *,—0AIR NITROGEN ANALYZER TRIGGER VACUUM SOLENOID CONTROL ADC INTEGRATOR VOLUME NITROGEN FIG. 12. Measurement system of Yamashiro et al. (1975). 1667 t (min) FIG. 13. Estimated impulse response function for normal subject. 38 GEORGE A. BEKEY AND STANLEY M.

Diagnostic Systems B. Prosthetic and Therapeutic Systems VII. Extracutaneous Electronics VIII. Conclusions References 45 48 56 58 69 76 77 78 80 82 83 89 91 93 95 I. INTRODUCTION circuit consists of a functional assembly of tens, hundreds, or thousands of transistors and related circuit elements fabricated in situ within a minute monolithic crystal of silicon. During the past decade, silicon monolithic integrated circuits have had a revolutionary impact on the electronics industry. Today, they are ubiquitous in electronics.

Typically, hydrogen reduction of silicon tetrachloride (SiCl4) at temperatures of 1150 to 1250°C is used to produce the single-crystal silicon layer; diborane (B 2 H 6 ) is used for doping of P-type layers and phosphine (PH 3 ) for N-type layers (Ghandhi, 1969). The wafers rest on an rf induction-heated graphite susceptor enclosed within a reaction chamber whose quartz walls are cooled to avoid silicon deposits on them. The princi­ pal purpose the epitaxial layer serves is to facilitate electrical isolation of the individual elements—transistors, diodes, resistors, and capacitors—in the N P N transistor integrated circuit of Fig.

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